Viewing an active electronic circuit with a scanning electron microscope--- make money online

I used my DIY scanning electron microscope to view a 555 timer circuit while it was powered. The circuit is a simple oscillator with a very long time constant to make the changes easy to see. My plan was to view the silicon die itself, and hopefully discern changes in its internal circuitry as the oscillations occurred. As it turns out, I was only able to "see" the charge of the electrical wires going to the chip socket. There is likely a clear oxide layer that covers the

silicon die, and needs to be removed with hydrofluoric acid in order to use the SEM to inspect the die itself while powered.

I can see electricity hey everyone

here's an experiment I wanted to try for

a while the idea is to put a working

electric circuit into a scanning

electron microscope and then use the

microscope to probe the circuit while

it's operating so one of the cool things

is you can do this with an integrated

circuit that you D capped and there you

can see the actual traces inside the IC

change charge state so let me show you

how I did this

I've been decapping chips for a little

while now first did a video a couple

months ago about it and I use fuming

nitric acid to dissolve away the package

after milling a little pocket in the top

of the chip so for this experiment I

wanted to use a circuit that was

self-contained so I went to the

venerable 555 timer chip and Dee capped

a few of the C Mo's variants of the 5 5

5 and then verify that they were still

working soldered up a little circuit

onto a socket and just put an LED on it

and had it flash very slowly so I wanted

a very long time constants that I could

be sure I was seeing the state change

fit if it flashed too quickly it might

be difficult for me to see the change in

the scanning electron microscope image I

took the LED out of the circuit and

replaced it with just a plain old

resistor and the reason for this is that

the scanning electron microscope uses a

photomultiplier tube to detect the

electron signal and if there's any light

inside the electron microscope chamber

that will very much pollute the signal

so I had to switch to just a plain old

resistor and to make sure that the

circuit is still working I connected a

current meter in series with the voltage

supply so about 8 volts the circuit

oscillates between 10 mil 10 milliamps

and about 2 milliamps

I mounted the circuit with some double

stick tape inside the scanning electron

microscope and then hooked up its power

leads to one of my unused sparkplug

insulators in the in the scope and set

it up with a power supply on the current

meter and verified that the circuit was

still working I should add that I didn't

do anything besides remove the epoxy

packaging from the IC so there's

probably an oxide layer on the top of

the integrated circuit I'll get to that

later I turned on the scope as usual

it's been a while since I've fired it up

and I had a problem with my high vacuum

gauge so even though the hive of the

high vacuum gauge indicated that there

was too much air in the chamber over

time times 10 to the minus 2 tour but I

didn't believe it and press the head

anyway it seemed to work so I'm going to

figure out what happened to my pen

engage I got the scope ready for

inspection turned on everything got all

the proper labels in place the output

from my scanning electron microscope is

than oscilloscope screen so I set that

up and adjusted the contrast and

everything and lo and behold pretty

pretty soon after I got it setup I could

see the contrast in the image changing

in time with the current draw going into

the circuit so I was actually seeing the

electricity flow through the circuit or

at least see the charge difference as

the circuit oscillated but I wasn't

actually seeing the integrated circuit

itself changed what I was actually

seeing as the wires around it and not

even the bond wires I mean just the the

macroscopic wires that I soldered to the

to the chip socket so i zoomed in a bit

on the chip itself and this actually

killed it so after after a few minutes

of zoomed in scanning electron beam on

the chip it eventually stopped working

and it drew about 13 milliamps more than

the 10 it was drawing in its own state

before and if you look closely in the

video you can actually see the wires

sort of twitching a little bit so this

is pretty cool this is actually a

diagnostic technique you don't even

really need an oscilloscope probe you

can actually just look at it with a

scanning electron microscope and see the

charge at are changing so you can see

there is sort of a glitch going on in

there now I haven't done much debugging

to figure out what's going on but

certainly the 5 5 5 is fried from the

electron beam I was keeping it down

below about 3 kilovolts for the

acceleration but even at that is

probably enough to build up enough

charge inside the chip to destroy it so

for my next trick I will try decapping

the chip and then removing the oxide

layer that's on the top with

hydrofluoric acid so this should prevent

a charge from building up in the

insulation on top of the chip this might

explain why I was able to see the charge

chain

in the electrical conductor is near the

chip but not in the IC itself because

there's an insulator over a clear oxide

later all right well I hope you enjoyed

that we have a long ways to go here but

I think we'll pretty soon be able to

decaf a more complicated chip and run it

in the SEM and see what's going on in

the dye in real time all right see you

next time

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